| PE-400 | 单位-Unit |
※运动空间-Travel range |
|
|
| ±200，±200，±150 | mm |
| ±20，±20，±20 | deg |
※重复定位精度- Repeatability |
|
|
| ±0.5 | μm |
| ±0.3 | μm |
| ±3 | μrad |
| ±6 | μrad |
最小步长- Min. incremental motion |
|
|
| 0.3 | μm |
| 2 | μrad |
运行速度-Velocity |
|
|
| 0.8，0.8，0.4 | mm/s |
| 0.2，0.2，0.4 | deg/s |
反向间隙-Backlash |
|
|
| 5 | μm |
| 3 | μm |
| 25 | μrad |
| 50 | μrad |
系统刚性- Stiffness |
|
|
| 8.5 | N/μm |
| 30 | N/μm |
其他性能- Other performance |
|
|
负载能力（正装/任意） -Load(base plate horizontal / any ) | 400/140 | Kg |
断电保持力（正装/任意） -Holding force(base plate horizontal / any ) | 4000/1400 | N |
质量-Mass | 100 | Kg |
| 编码器类型-Encoder types | 绝对光栅尺（absolute grating ruler） | |
工作温度-Operating temperature range | 0~50 | ℃ |
供电需求-Main power | 110-220VAC/50-60Hz |
|
| 可选项-Other options | 兼容洁净室（Cleanroom-compatible） 兼容真空环境（Compatible with vacuum environment） | |
|
|
※The motion space refers to the maximum range of motion for a single degree of freedom when the system is in its zero position state.
※The repeatability accuracy refers to the one-way repeatability accuracy, taking one standard deviation.
※During the data acquisition process, no compensation was performed for the movements of each degree of freedom.
